Select Language :

Our Solutions

Our Solutions

HOMEOur Solutions ▶ SPP Treatment

SPP Treatment


    SPP=Super Passivation Process
  • The surface modification of stainless steel helps form a dense Cr2O3 film with no defect at the top surface layer.
    It provides excellent corrosion resistance to halogen gas such as hydrofluoric acid or hydrochloric acid , and enhances vacuum characteristic.
    The surface modification of stainless steel has revealed a variety of phenomena that were not common to the steel.
    It is a promising technology in the future fields of hydrogen infrastructure and ultrahigh vacuum.
  • Countermeasures to corrosion and metal contamination, reduced gas emission
  • Primary piping, valves, MFC, regulator parts, chambers, and chamber peripheral parts

Material Data

SPP treated surface examples observed by FE-SEM showing nanoparticles of chromium oxide

Photographed by Emeritus Professor Shimizu of Keio University

SUS316L EP treatment vs SPP treatment GDOES analysis example

Exposure test result of SPP treatment

HCl exposure result

HF exposure result

HBr exposure result

HBr exposure result (piping) 

HF solution exposure result 

Metal contamination measurement of SPP treated piping

HBr exposure

Temperature programmed desorption of SPP treated piping

List of Our Solutions

Product Name Feature Film Material Film Thickness Heat Resistant Temperature Corrosion Resistance Effect Example
Silica Coat
Coating of metal surface with high-purity SiO2 equivalent to synthetic fused silica realizes metal contamination free surface. SiO2 0.7μm 350℃ HCl
Prevention of metal oxidation at high temperatures Reduction of metal contamination 
SPP Treatment Dense chromium oxide film formed on the surface of SUS316L provides excellent corrosion resistance even to HF and HCL. Cr2O3 40Å 300℃ HCl
Reduction of metal contamination 

*1 Not applicable to HF, F2, or other F based gas