Outline: Coating of metal surface with high-purity SiO2 equivalent to synthetic fused silica realizes metal contamination free surface.
Applications: Chambers, chamber peripheral materials, etc.
Outline : Surface modification of stainless steel.
Formation of dense chromium oxide film provides excellent corrosion resistance even to HF and HCL.
Applications : Inner surface of primary piping.
Valves, massflow controllers, regulators and other parts.